SYSTEM AND METHOD FOR SCRIBING SUBSTRATE

摘要

A substrate scribing system and a method for scribing a substrate are provided to suppress damage of a pad part of a mounting substrate and to perform a scribing process in an in-line manner. A plurality of conveyers(10a-10g) are used for forming a first and second working lines to perform a scribing process to an original substrate(1) including an upper plate and a lower plate. A first scribing module(20) is formed in a conveyer region for forming the first working line. The first scribing module is used for forming a plurality of intermediate substrates(5) by forming scribe lines on upper and lower surfaces of the original substrate along one direction of a first line Y-axis direction parallel to the first working line and a first line X-axis direction crossing the first working line. A second scribing module(50) is formed in the conveyer region for forming the second working line. The second scribing module is used for forming a plurality of unit substrates by forming scribe lines on upper and lower surfaces of the original substrate along one direction of a second line Y-axis direction parallel to the second working line and a second line X-axis direction crossing the second working line. A transferring unit(40) is formed at an intersection between the conveyers to transfer the intermediate substrates to the conveyer region for forming the second working line.