发明名称 |
Polishing slurry and polishing method |
摘要 |
<p>A polishing slurry comprising an oxidant, a metal oxide dissolver, a metal inhibitor and water and having a pH from 2 to 5, wherein:
the metal inhibitor contains one or more types selected from the group (C-group) consisting of aromatic compounds having a triazole skeleton and one or more types selected from the group (D-group) consisting of aliphatic compounds having a triazole skeleton, compounds having a pyrimidine skeleton, compounds having an imidazole skeleton, compounds having a guanidine skeleton, compounds having a thiazole skeleton and compounds having a pyrazole skeleton.</p> |
申请公布号 |
EP1881524(A1) |
申请公布日期 |
2008.01.23 |
申请号 |
EP20070020898 |
申请日期 |
2003.04.28 |
申请人 |
HITACHI CHEMICAL CO., LTD. |
发明人 |
KURATA, YASUSHI;MASUDA, KATSUYUKI;ONO, HIROSHI;KAMIGATA, YASUO;ENOMOTO, KAZUHIRO |
分类号 |
H01L21/304;B24B37/00;B24B57/02;C09G1/02;C09G1/04;H01L21/321 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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