| 摘要 |
A vacuum valve is provided to detect whether a valve plate is located at a closed position or a middle position by recognizing the position of a transverse drive unit outside a vacuum region. A vacuum valve includes a valve plate, a valve rod(11), a transverse drive unit(12), a longitudinal drive unit(13), and a guide unit(18). The valve rod supports the valve plate. The transverse drive unit can regulate the valve plate from the opened position to a middle position in the transverse regulation direction and the middle position to the opened position in the reverse direction of the transverse regulation direction. The longitudinal drive unit can regulate the valve plate from the middle position to a closed position in the longitudinal regulation direction and from the closed position to the middle position in the reverse direction of the transverse regulation direction. The guide unit movably guides the transverse drive unit in parallel to the longitudinal regulation direction with respect to the valve body.
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