Multi-probe measuring device and method of use

摘要

The invention provides a local probe measuring device (10) for effecting local measurements refering to a sample (22), comprising a plurality of local probes (12,14) for local measurements with respect to a sample or a reference surface, a positioning arrangement adapted to commonly adjust the distances or lateral positions of said local probes with respect to the sample or the reference surface on the basis of measurement data from at least one of said local probes. A plurality of detection arrangements (40,42), each being associated or adapted to be associated to one particular of said local probes and adapted to independently detect measurement data refering to local measurements effected by said particular local probe and methods for effecting local measurements and local manipulations by means of multiple local probes are provided.