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发明名称
REMA objective for microlithographic projection illumination
摘要
申请公布号
EP0783137(B1)
申请公布日期
2008.01.23
申请号
EP19960118016
申请日期
1996.11.09
申请人
CARL ZEISS SMT AG
发明人
FUERTER, GERD;WANGLER, JOHANNES;DINGER, UDO;ITTNER, GERHARD
分类号
G03F7/20;G02B13/14;G02B13/24;H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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