| 摘要 |
A device and a method for measuring contact resistance of a probe card needle are provided to reduce the additional process time by determining whether to use external washing equipments or not, after checking the state of the probe card needle and to estimate the life time of a probe card on the basis of voltage and resistance data values output while the probe card needle is in an optimal state. A contact resistance measurement device(50) installed in a probe card needle washing apparatus(40) to use a contact state between a tester channel pin(65) and a probe card needle(20) comprises a measuring frame(60) positioned in the center of the upside of the needle washing apparatus; plural tester channel pins inserted into the periphery of the upper lateral part of the measuring frame and protruded; a resistor(54) connected to the lower side of the measuring frame and made of components with a low resistance value; and a ground(56) connected toward the lower side of the resistor and installed at the outer side of the needle washing apparatus. |
