METHOD FOR FABRICATION OF ORGANIC THIN FILM TRANSISTOR USING MICROCONTACT PRINTING

摘要

A method for manufacturing an organic thin film driving device using a microcontact printing is provided to improve electron mobility and to implement a fine patterning of 10 ‘í below by using a microcontact printing process and a low temperature process. A metal thin film is formed on a substrate and a gate electrode is formed by using a microcontact printing process(S1). An organic dielectric is formed on the gate electrode and then is patterned(S2). A metal thin film is formed on the organic dielectric and drain and source electrodes are formed by using the microcontact printing process(S3). An organic semiconductor layer is formed on an upper portion including the drain and source electrodes and then is patterned(S4). The microcontact printing process including a procedure for producing a PDMS(PolyDiMethylSiloxane) stamp by mixing polymer mold materials and a procedure for inking a self-assembled monolayer on a surface of the PDMS stamp and transferring a printing pattern on the substrate on which the metal thin film is coated.