POLYMER MEMORY DEVICE AND METHOD FOR FORMING THEREOF

摘要

A polymer memory device and a forming method thereof are provided to arrange two or more date storage regions vertically by laminating hardening polymer layers. A first electrode is arranged on a substrate(1). A first hardening polymer layer(15) covers the first electrode. A second electrode(21) intersected with the second electrode is formed on the first hardening polymer layer. A second hardening polymer layer(25) covers the second electrode. A third electrode(31) intersected with the second electrode is formed on the second hardening polymer. The first hardening polymer layer and the second hardening polymer layer respectively include fullerene or fullerene derivatives. The first and second hardening polymer layers respectively include polyimide layers. The polyimide layer includes a BPDA-PPD(4,4'-biphthalic dianhydride p-phenylene diamine) polyimide layer. The fullerene derivative includes PCBM([6,6]-phenyl C61 butyric acid methyl ester).