| 摘要 |
The invention is about a support for the production of microelectronic, microoptoelectronic or micromechanical devices. Said support (10; 60) comprises a base (11; 61) having the function of backing element, on which i s deposited a getter material or drier material in form of discrete deposits (13, 13', ...; 63, 63', ...) that are at least partially exposed to the atmosphere present around said support (10; 60). |
