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发明名称
Susceptor And Method of Manufacturing the Same
摘要
申请公布号
KR100795756(B1)
申请公布日期
2008.01.21
申请号
KR20060038732
申请日期
2006.04.28
申请人
发明人
分类号
H01L21/683
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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