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发明名称
Способ изготовлени микрорисунка в многослойной структуре с полицидом тугоплавкого металла
摘要
申请公布号
RU1697563(C)
申请公布日期
2008.01.20
申请号
SU19904815649
申请日期
1990.04.17
申请人
Научно-производственное объединение "Интеграл"
发明人
Родин Г.Ф.;Базыленко М.В.;Ба нов А.С.;Турцевич А.С.
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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