| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of easily recognizing operation in each of a plurality of directions where the acceleration can be detected. <P>SOLUTION: The acceleration sensor comprises a sensor substrate 1 that has gauge resistors Rx1-Rx4, Ry1-Ry4 and Rz1-Rz4 disposed in a movable section formed of a weight section 12 and four bending sections 13 and can detect accelerations in three directions, a first cover substrate 2 joined to one surface side of the sensor substrate 1, and a second cover substrate 3 joined to the other surface side of the sensor substrate 1. A package is constituted by the cover substrates 2 and 3 and a frame section 11 of the sensor substrate 1. The acceleration sensor has, as a driving means for operation recognition for forcibly moving the movable section with an electrostatic force, a plurality of pairs of movable electrodes 15 disposed in the weight section 12 and fixed electrodes 26 that are disposed on the first cover substrate 2 and face the movable electrodes 15, and can apply driving voltage for operation recognition independently every pair of movable electrode 15 and fixed electrode 26. <P>COPYRIGHT: (C)2008,JPO&INPIT |
