| 摘要 |
PROBLEM TO BE SOLVED: To provide a reference chart for inspecting an optical characteristic, a reference double refraction measuring instrument, a method of inspecting the optical characteristic, and a method of measuring the optical characteristic, capable of obtaining the same absolute precision and reproduction precision even in any double refraction measuring instrument, without depending on a retardation (Re) by the plurality of refraction measuring instruments, a retardation (Re) and an area of an optical axis in measurement of the optical axis. SOLUTION: A correlation between a reference value set by the reference double refraction measuring instrument 20B, and a measured value by a device 20A to be calibrated with respect to the reference chart 10 is stored preliminarily in a memory 31, using the reference chart 10 for inspecting the optical characteristic held arrangedly while an optical axis angle and/or the retardation (Re) are/is varied gradually at a fixed interval, a measured value of a measuring objective sample by the device 20A is compared with the value in the memory 31, and the optical characteristic of the sample is specified by selecting the value of the memory 31 in the nearest to be interpolation-computed, when not the same value. COPYRIGHT: (C)2008,JPO&INPIT
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