SCINTILLATOR PLATE FOR RADIATION, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a scintillator plate for radiation having an excellent extracting efficiency of emission with radiation and having a scintillator crystal having an excellent moisture resistance, and also to provide its manufacturing method. SOLUTION: The scintillator plate comprises: a phosphor layer 3 of columnar crystals formed on a substrate 2 and emitting light by irradiation with radiation; and a protective layer formed on the layer 3. The Cs-F bond is formed on the surface of the phosphor layer 3 by introducing a carrier gas of Ar carrying a fluorine solvent HFE to form a phosphor layer 8. Then, polyparaxylylene is deposited to form the protective layer. The surface of the phosphor layer and the protective layer are disposed in contact with each other. COPYRIGHT: (C)2008,JPO&INPIT