| 摘要 |
A coating providing high abrasion and chemical resistance composed of a barrier layer (40) from vanadium, molybdenum, niobium, tantalum and the like, and an outer layer (50) of diamond-like carbon. The coating is especially applicable for acoustic wave device (AWD) based sensors, and for passivating an electrode such as an electrode (30) deposited on the AWD sensing area. The coating provides excellent mechanical and acoustical characteristics for acoustic wave devices allowing the sensor to operate in harsh environments.
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