发明名称 PROCESSING METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide processing method and apparatus which can be used for decreasing the whole time required for pressing a mold and releasing the mold, and for achieving excellent through-put. SOLUTION: The processing method presses a mold formed with a pattern and a resin applied on a body to be transferred to transfer the pattern onto the body to be transferred. The processing method is characterized in that the processing method has a step in which the body to be transferred and the mold are relatively moved in the direction perpendicular to the pressing direction of the mold or the body to be transferred so as to face the shot on the body to be transferred to the mold, and a step in which the resin applied on the shot on the body to be transferred is pressed on the mold, and the pressing step is started before the moving step is completed. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008006704(A) 申请公布日期 2008.01.17
申请号 JP20060179509 申请日期 2006.06.29
申请人 CANON INC 发明人 KAWAKAMI EIGO;HARUMI KAZUYUKI
分类号 B29C59/02;B82B3/00;H01L21/027 主分类号 B29C59/02
代理机构 代理人
主权项
地址