| 摘要 |
PROBLEM TO BE SOLVED: To provide an auxiliary measurement device which reduces the magnitude of variation of measurement in the repetitive observation of observation optical system, or reduces the variation between measures, and also to provide a measurement device provided with the auxiliary measurement device. SOLUTION: A reflection member 1 is provided so as to project the image of the pupil of the measurer in the aperture of the emission port of the measurement light of the observation optical system to be measured or the measurement device for measuring the optical performance. COPYRIGHT: (C)2008,JPO&INPIT
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