| 摘要 |
A dry apparatus for a large size substrate is provided to improve a drying efficiency by decreasing a transfer distance of super dry air by arranging a super dry air supply unit under a bath. A dry apparatus for a large size substrate includes a bath(10), at least one partition(31), and air knives(30,40). The bath isolates a dry space for drying a transfer substrate from other process spaces. The partition encloses the bath and divides the dry space. The air knives are implemented on the partition and spray dry or super dry air on a large size substrate which is transferred to the divided dry space. The dry space is sequentially divided into dry and super dry spaces along a transfer direction of the large size substrate. The air knife receives the super dry air from a super dry air supplier and sprays the super dry air.
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