发明名称 METHOD FOR FORMING PATTERN ON SUBSTRATE BY USING MOLD OF TRAPEZOID
摘要 A method for forming a pattern on a substrate by using a trapezoid-shaped mold is provided to enhance stability of a patterning material for filling an intaglio pattern and to obtain a low aspect ratio by using a trapezoid-shaped intaglio pattern. A mold(108) includes a pattern surface which is formed with a trapezoid-shaped intaglio pattern and a trapezoid-shaped engraving pattern. The trapezoid-shaped intaglio pattern is selectively filled with a patterning material. The pattern surface of the mold is aligned on a desired position of a substrate(112). The patterning material of the trapezoid-shaped intaglio pattern of the mold is printed on the substrate by performing a high-temperature press process. An inverse trapezoid-shaped pattern(104) is formed on the substrate by printing the trapezoid-shaped intaglio pattern of the mold on the substrate.
申请公布号 KR100795236(B1) 申请公布日期 2008.01.17
申请号 KR20060024425 申请日期 2006.03.16
申请人 发明人
分类号 H01J9/24;H01J11/20 主分类号 H01J9/24
代理机构 代理人
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