发明名称 SEMICONDUCTOR DEVICE, AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device by which latch up can be inhibited when a plurality of wells of different depths exist, and to provide its manufacturing method. SOLUTION: This semiconductor device includes a p-type silicon substrate 20, a shallow n well 34 formed in the silicon substrate 20, a shallow p well 30 formed in the silicon substrate 20 next to the shallow n well 34, and an n well 28 deeper than the p well 30 which is formed in the silicon substrate 20 next to the shallow p well 30. A p well 26 deeper than the p well 30 is formed in the silicon substrate 20 between the shallow p well 30 and the deep n well 28. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008010756(A) 申请公布日期 2008.01.17
申请号 JP20060181946 申请日期 2006.06.30
申请人 FUJITSU LTD 发明人 EMA TAIJI;ASANO MASAYOSHI;ANEZAKI TORU;ARIYOSHI JUNICHI
分类号 H01L27/08;H01L21/28;H01L21/8238;H01L21/8247;H01L27/092;H01L27/10;H01L27/115;H01L29/417;H01L29/788;H01L29/792 主分类号 H01L27/08
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