发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor memory device which can improve operating reliability. SOLUTION: The semiconductor memory device is formed on the surface (001) of a semiconductor substrate 1; and is equipped with an n-type first MIS transistor 3 having a charge storage layer FG in which data retention is possible, and a memory cell block 21 including more than 3 of the first MIS transistors 3 in which current paths are connected in series. The direction along a source S to a drain D in the first MIS transistor 3 is parallel to either of the [001] direction and the [010] direction of the semiconductor substrate 1. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008010645(A) 申请公布日期 2008.01.17
申请号 JP20060179835 申请日期 2006.06.29
申请人 TOSHIBA CORP 发明人 GOMIKAWA KENJI;NOGUCHI MITSUHIRO;AOI TAKAYUKI
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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