| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide magnetic polishing method and device capable of properly supplying magnetic polishing liquid and easily replacing the magnetic polishing liquid without requiring piping equipment for circulation such as a piping passage and a pump, as supply systems of the magnetic polishing liquid, and being advantageous to reduce cost. <P>SOLUTION: A permanent magnet 20 is provided as a magnetic generation source at a distal end in a polishing tool 2 and is linked with a driving means having a multiaxis control function as for at least x-axis, y-axis and z-axis. This magnetic polishing device is provided with a storage tank 5 for storing the magnetic polishing liquid 4 mixed with non-magnetic abrasive grains. A polishing object 1 is fixed to a supporting table 3 and the polishing tool 2 is arranged to face to the polishing object 1 by non-contact. By starting the driving means, the polishing tool 2 is made to perform a prescribed motion operation and performs fluid polishing by magnetic cluster generated in the magnetic polishing liquid existing in the surrounding. By three-dimensionally moving the polishing tool 2 at a prescribed time, the polishing tool 2 is dipped into the storage tank 5, is drawn and is returned to the fluid polishing operation again. <P>COPYRIGHT: (C)2008,JPO&INPIT |
