发明名称 NANOIMPRINT COMPOSITION
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a nanoimprint composition which has high heat resistance and does not allow a formed relief pattern to easily disappear by heating and to easily and efficiently produce the formation of a relief pattern in the nanoimprint composition. <P>SOLUTION: The nanoimprint composition comprises a polyamic acid (B) and an epoxy resin (C). The nanoimprint composition comprises a polyester-polyamic acid (A1) and the epoxy resin (C). <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008007623(A) 申请公布日期 2008.01.17
申请号 JP20060179299 申请日期 2006.06.29
申请人 CHISSO CORP 发明人 SATO HIROYUKI
分类号 C08G59/42;B82B3/00;B82Y10/00;B82Y30/00;B82Y40/00;C08G73/10;C09D11/10;C09D11/102;H01L21/027 主分类号 C08G59/42
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