| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a low-cost thin film piezoelectric resonator which has a piezoelectric material layer sandwiched between upper and lower electrodes. <P>SOLUTION: The thin film piezoelectric resonator comprises the lower electrode provided on a lower hollow portion while supported on a base, the piezoelectric material layer provided on the lower electrode, the upper electrode provided on the piezoelectric material layer, a side wall portion provided enclosing a circumference of the upper electrode and formed partially of the piezoelectric material layer, an upper sealing body joined to an upper end of the side wall portion and defining an upper hollow portion with the side wall portion, and a relay electrode provided on the base below a portion of the piezoelectric material layer provided as a portion of the side wall portion to lead the lower electrode and upper electrode out onto the base outside the side wall portion respectively. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
