| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of aluminium nitride which is constituted by substantially spherical particles and does not require a crush process. SOLUTION: The manufacturing method of aluminium nitride comprises holding aluminium powder in a nitrogen atmosphere having a nitrogen pressure of 103-200 KPa, and proceeding a nitriding reaction at 500-1,000°C, wherein the nitriding reaction is finished in a state where the aluminium powder is suspended. COPYRIGHT: (C)2008,JPO&INPIT
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