| 摘要 |
PROBLEM TO BE SOLVED: To emit a plurality of laser beams different in light beam diameter while being switched in a short time. SOLUTION: The illuminator 1 is equipped with: an optical path combining means 20 combining the optical paths of the plurality of laser beams L<SB>11</SB>and L<SB>12</SB>having the different beam diameter; a beam position adjusting means 21 adjusting a beam position in a direction crossing with the optical axes of the laser beams L<SB>11</SB>and L<SB>12</SB>whose optical paths are combined by the optical path combining means 20; and a condensing means 22 condensing the laser beams L<SB>11</SB>and L<SB>12</SB>positionally adjusted by the beam position adjusting means 21 on a sample A. COPYRIGHT: (C)2008,JPO&INPIT
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