| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of soft molds used for soft lithography and a forming method of thin film patterns by soft lithography. SOLUTION: The manufacturing method of soft molds comprises the step of preparing a master mold having a pattern formed of recessed faces and projected faces on one face, the step of forming a prepolymer layer by injecting a prepolymer on the master mold, the step of injecting water on the prepolymer layer, the step of forming the soft mold composed of a polymer by curing the prepolymer layer and removing the water, and the step of separating the soft mold from the master mold. COPYRIGHT: (C)2008,JPO&INPIT
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