| 摘要 |
PROBLEM TO BE SOLVED: To provide a lamination type fine processing apparatus for transfering precisely a pattern, and a lamination unit used therein. SOLUTION: The lamination type fine processing apparatus is constituted so that a plurality of molds 100 having predetermined patterns and processing targets 200 are stacked in series in a pressing direction to be pressed and the patterns of the molds 100 are transferred to the surfaces 200a to be molded of the processing targets 200 and equipped with pressure dispersing plates 12 set to 0.9-1.1αin the coefficient of thermal expansion when the coefficient of thermal expansion of the molds 100 is set toαand arranged on the surface on the side reverse to the surfaces 200a to be molded of the processing targets 200 to disperse the pressure applied to the processing targets 200. COPYRIGHT: (C)2008,JPO&INPIT
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