ROBOTIC DIE SORTER WITH OPTICAL INSPECTION SYSTEM

摘要

A robotic die sorter (10) having pick and place arm assemblies (12a, 12b) and a multi-camera optical inspection system (19) is disclosed. A pick arm (13a) of the pick arm assembly (12a) picks a die (15) from a semiconductor water (14), and a place arm (13b) of the place arm assembly (12b) receives the die (15) from the pick arm (13a) and places same in a reel of pocketed tape (16). After picking, the pick arm (13a) and the place arm (13b) are rotated into facing arrangement, whereupon the die (15) is transferred to the place head (70b) of the place arm (13b) and a camera (20c) of the optical inspection system (19) to detect defects in the die (15). After inspection, the place arm (13b) rotates toward the pocketed tape (16) and places the die (15) into the pocketed tape (16). Additional cameras of the optical inspection system (19) allow for calibration of the pick and place arms (13a, 13b), as well as monitoring of the die transfer process.