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发明名称
HERSTELLUNGSVERFAHREN FÜR SOI-HALBLEITERBAUELEMENTE
摘要
申请公布号
DE60223910(D1)
申请公布日期
2008.01.17
申请号
DE20026023910
申请日期
2002.03.25
申请人
UNIVERSITE CATHOLIQUE DE LOUVAIN
发明人
FLANDRE, DENIS;NEVE DE MEVERGNIES, AMAURY;RASKIN, JEAN-PIERRE
分类号
H01L21/336;H01L21/335;H01L21/762;H01L29/423;H01L29/786
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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