| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a semiconductor device, which reduces the test time by making an apparatus for in inspecting the semiconductor device operate efficiently. SOLUTION: The apparatus for inspecting a semiconductor device includes: a chamber 40 for housing a plurality of tester boards 12 having semiconductor devices 11 mounted thereon; a board handler section 30 for performing an operation involved in transferring the tester boards 12; and a device-test-conducting control device for conducting predetermined tests on semiconductor devices 11 mounted by unit of tester board 12 set inside the chamber 40. While the device-test-conducting control device is conducting a predetermined test, the board handler section 30 carries, out of the chamber 40, a tester board 12 whose semiconductor devices 11 have been tested, and sets another tester board 12 in a vocant space in the chamber 40. COPYRIGHT: (C)2008,JPO&INPIT
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