发明名称 Repairing method for dark areas on a surface profile and a surface profile measuring method
摘要 A repairing method for a surface profile is provided. The intensity on the waveform of the interference diagrams or the existence of envelope on the waveform of the interference diagram are used to decide whether the respected pixel is located in a dark area on the surface profile or not. Then, mark the pixel located in the dark area. Afterward, repair the marked pixel by using the surrounding effective pixels on the surface profile.
申请公布号 US2008013101(A1) 申请公布日期 2008.01.17
申请号 US20060486311 申请日期 2006.07.14
申请人 CHROMA ATE INC. 发明人 LIN YAOMIN;CHANG HUNG-CHANG
分类号 G01B11/02 主分类号 G01B11/02
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