发明名称 METHOD FOR PRODUCING A MATRIX OF INDIVIDUAL ELECTRONIC COMPONENTS AND MATRIX PRODUCED THEREBY
摘要 The invention relates to a method of manufacturing a matrix of electronic components (111), comprising a step of producing an active layer (101) on a substrate (100), and a step of individualizing components by forming trenches (102) in the active layer (101) at least until the substrate (100) emerges. The method comprises the steps of: depositing a layer of functional material (102) on the active layer (101); depositing a photosensitive resin (104) on the layer of material (103) in such a way as to fill said trenches (102) and to form a thin film (115) on the upper face of the components (111); at least partially exposing the resin (104) to radiation while under-exposing the portion of resin of the trenches; developing the resin (104) so as to remove the properly exposed portion thereof; removing the portion of layer of functional material (103) that shows through after the development step; and removing the remaining portion of resin.
申请公布号 WO2008007008(A2) 申请公布日期 2008.01.17
申请号 WO2007FR51618 申请日期 2007.07.09
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;MARION, FRANCOIS;GRAVRAND, OLIVIER 发明人 MARION, FRANCOIS;GRAVRAND, OLIVIER
分类号 H01L25/065;H01L33/62 主分类号 H01L25/065
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