| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezo-electric device which reduces the temperature drift and improving the manufacturing yield. <P>SOLUTION: For example, the piezo-electric oscillation gyro comprises: a central base 7; a pair of oscillation arms 8a, 8b for detection which is inflection oscillating while extending forward and back ward from the central base 7; a pair of connection arms 9a, 9b extending from the central base 7 to the left and right perpendicular to the oscillation arms 8a, 8b for detection; two pairs of oscillation arms 11a, 11b and 12a, 12b extending forward and backward from the bases provided at the tips of the connection arms parallel to the oscillation arms 8a, 8b; a substrate 13 provided with electrodes; a metal tab tape 14 supporting the central base 7 one end of which is fixed to the central base 7 and the other end of which is fixed to the electrode of the substrate 13; and resin 21 provided on the metal tab tape 14. <P>COPYRIGHT: (C)2008,JPO&INPIT |
