MANUFACTURING METHOD FOR PIEZOELECTRIC BODY, PIEZOELECTRIC ELEMENT, AND LIQUID DISCHARGE HEAD

摘要

A method of manufacturing a piezoelectric body, formed from a film made of an ABO₃ perovskite oxide crystal epitaxially grown on a substrate, comprises forming a film containing an AO_x crystal by using an oxide containing an A element and a B element by heating the substrate to a temperature which is equal to or higher than a temperature at which the AO_x crystal is formed, and which is lower than a temperature at which the ABO₃ perovskite oxide crystal is formed and changing the film containing the AO_x crystal into a film made of the ABO₃ perovskite oxide crystal by heating the substrate to a temperature which exceeds a temperature at which the AO_x crystal can be present, and which is equal to or higher than a temperature at which the ABO₃ perovskite oxide crystal is formed.