发明名称 DFR DEVELOPER CHEMICAL MIXING AND SUPPLY SYSTEM
摘要 A DFR developer chemical mixing and supply system is provided to obtain a DFR developer chemical having desired density by controlling the amount of chemicals and pure water and the temperature and density of the chemicals and the pure water. A chemical tank(101) receives chemicals from a chemical supply vehicle in order to store the chemicals. A pure water tank(103) is formed to store pure water. A fourth automatic valve is formed at a distributive tube to be connected to the pure tank. A first agitator(119) is formed to mix the chemicals with a mixed solution of a mixing tank(110). A first pump(102), a first flow meter(106), and a first automatic valve(107) are formed at a distributive tube for connecting the chemical tank with the mixing tank. A second pump(104), a heat exchanger(105), a second flow meter(108), and a second automatic valve(109) are formed at an insulated tube for connecting the pure water tank with the mixing tank. An automatic temperature control valve(118) is formed at a tube for supplying steam to the heat exchanger. A second agitator(120) is formed to mix the mixed solution of the mixing tank with a stored solution of the storage tank(112). A third pump(111) is formed at a distributive tank for connecting the mixing tank with the storage tank. A fourth pump(113), a third automatic valve(114), an automatic flow control valve(115), and a third flow meter(116) are formed at a distributive tube for connecting the storage tank and an electrode developing apparatus. A PLC is formed to output a control signal by recognizing and determining information necessary for on/off operations of the automatic valves and the pumps. A communication system checks a state of system in real time.
申请公布号 KR20080006698(A) 申请公布日期 2008.01.17
申请号 KR20060065716 申请日期 2006.07.13
申请人 SCT CO., LTD. 发明人 KIM, HYUN GYOO
分类号 H01J9/24;H01J9/20;H01J11/20 主分类号 H01J9/24
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