| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor with its reliability enhanced by surely performing wire disconnection detection. SOLUTION: The capacitance-type pressure sensor is used for measuring a change in a physical quantity of a measuring medium by measuring two capacitances wherein a mutual relative relation between the capacitances changes correspondently to the change in the physical quantity of the measuring medium. The sensor is equipped with the function of measuring the individual values CX and CY of the respective capacitances to determine that a wire-disconnection/anomaly exists when at least either capacitance value of the capacitance values is less than a capacitance value A shown as a normal operating range of the pressure sensor. This ensures wire disconnection detection, thereby enhancing reliability. COPYRIGHT: (C)2008,JPO&INPIT |
