| 摘要 |
PROBLEM TO BE SOLVED: To make heat conductivity and rigidity of a vacuum chuck itself low, and to make ventilation resistance of the vacuum chuck high. SOLUTION: This vacuum chuck 1 is provided with a mounting part 2 made of porous body mainly made of silicon carbide and provided with a suction surface 2b to suck and hold a body to be sucked, and a supporting part 3 made of dense body mainly made of silicon carbide, provided with a suction passage 3a communicated with the suction surface 2b at the inside and supporting the mounting part 2 by surrounding the mounting part 2. The porous body forming the mounting part 2 is made by joining crystal grains of silicon carbide by silicon, and thickness of the mounting part 2 is≤35% (except 0%) of that of the supporting part 3. COPYRIGHT: (C)2008,JPO&INPIT |
