| 摘要 |
PROBLEM TO BE SOLVED: To restrain a conductive layer from becoming highly resistive by constituting so as to prevent an air gap from occurring in a conductive layer in a hole. SOLUTION: A third conductive layer 16 is formed inside a second conductive layer 15 in a contact hole 7. Accordingly, even if the air gap exists inside the second conductive layer after forming the second conductive layer 15 along the inner face of the contact hole 7, it is possible to embed the air gap. Consequently, it is possible to restrain the second/third conductive layers 15, 16 from becoming highly resistive, and also, to reduce each resistance value of the second/third conductive layers 15, 16. COPYRIGHT: (C)2008,JPO&INPIT |
