| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device on which an identification mark is located to make it possible to specify easily an electron beam testing terminal located on the semiconductor device. SOLUTION: The semiconductor device 10 is constructed in such a manner that a plurality of wiring layers are formed in a multi-layer structure through an insulating layer, and the electron beam testing terminal 5 connected with the wiring layer through a via-hole is located on the uppermost layer. An identification mark 6 to identify the identification terminal 5 is located near the testing terminal 5, and the identification mark 6 is structured so that a plurality of identification patterns 61 are arranged like a bar-code. COPYRIGHT: (C)2008,JPO&INPIT
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