SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

A surface position detecting apparatus is provided with a light transmitting optical system (SL) for guiding light to a surface (W) to be detected; a light receiving optical system (RL) for guiding the light to a light receiving surface; a detecting means (38) arranged on the light receiving surface; a splitting means (4) for performing view filed splitting to the light guided to the surface (W) into measuring light and reference light; and a composing means (5) for performing view field composition to the measuring light traveling toward the light receiving optical system (RL) through the surface (W) and the reference light traveling toward the light receiving optical system (RL) not through the surface (W). The detecting means (38) independently detects the reference light and the measuring light on the light receiving surface.