发明名称 |
SUBRESOLUTION SILICON FEATURES AND METHODS FOR FORMING THE SAME |
摘要 |
<p>Novel etch techniques are provided for shaping silicon features below the photolithographic resolution limits. FinFET devices are defined by recessing oxide (102) and exposing a silicon protrusion (124) to an isotropic etch, at least in the channel region. In one implementation, the protrusion (124) is contoured by a dry isotropic etch having excellent selectivity, using a downstream microwave plasma etch.</p> |
申请公布号 |
WO2008008204(A1) |
申请公布日期 |
2008.01.17 |
申请号 |
WO2007US15146 |
申请日期 |
2007.06.28 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
TOREK, KEVIN, J.;FISCHER, MARK;HANSON, ROBERT, J. |
分类号 |
H01L21/336;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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