| 摘要 |
A stripper chemical mixing and supply system is provided to obtain a stripper chemical having desired density by controlling the amount of chemicals and pure water and the temperature and density of the chemicals and the pure water. A chemical tank(101) receives chemicals from a chemical supply vehicle and stores the received chemicals. A pure water tank(103) stores pure water. A fourth automatic valve is positioned at a distributive tube for connecting the pure tank. A first agitator(119) mixes the chemicals and a mixed solution of a mixing tank(110) with each other. A first pump(102), a first flow meter(106), and a first automatic valve(107) are positioned at a distributive tube for connecting the chemical tank and the mixing tank with each other. A second pump(104), a heat exchanger(105), a second flow meter(108), and a second automatic valve(109) are positioned at an insulated tube for connecting the pure water tank and the mixing tank with each other. An automatic temperature control valve(118) is positioned at a tube for supplying steam to the heat exchanger. A second agitator(120) mixes the mixed solution of the mixing tank and a stored solution of a storage tank(112) with each other. A third pump(111) is positioned at a distributive tank for connecting the mixing tank and the storage tank with each other. A fourth pump(113), a third automatic valve(114), an automatic flow control valve(115), and a third flow meter(116) are positioned at a distributive tube for connecting the storage tank and an electrode developing apparatus. A PLC outputs a control signal by recognizing and determining information necessary for on/off operations of the automatic valves and the pumps. A communication system checks a state of system in real time.
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