发明名称 METHOD FOR GROWING SILICON SINGLE CRYSTAL
摘要 A method of growing a silicon single crystal. The method comprises growing a silicon single crystal by the Czochralski method under such conditions that a thermal stress is imposed on a side part of the silicon single crystal being grown. The atmospheric gas in which the single crystal is grown is a mixed gas comprising an inert gas and the gas of a hydrogen-atom-containing substance.
申请公布号 KR20080007277(A) 申请公布日期 2008.01.17
申请号 KR20077028614 申请日期 2005.12.01
申请人 SUMCO CORPORATION 发明人 INAMI SHUICHI;TAKASE NOBUMITSU;KOGURE YASUHIRO;HAMADA KEN;NAKAMURA TSUYOSHI
分类号 C30B29/06;C30B15/00;H01L21/20 主分类号 C30B29/06
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