| 摘要 |
PROBLEM TO BE SOLVED: To enhance reliability of sealing between both substrates when sticking a substrate for a flat display device to another substrates. SOLUTION: In this tape peeling device of an application system, a masking tape 81 is peeled off from the substrate 9 by a tape peeling head 43 and a substrate moving mechanism, and in parallel with this, a laser beam is applied from an irradiating part 46 to a seal region among regions from which the masking tape 81 on the substrate 9 has been peeled off. Thereby, low molecule components transferred to the seal regions from the adhesive of the masking tape 81 are removed from the seal region, or the molecule bonding is cut and activated, and wettability of the seal region to a sealing material is enhanced up to the same degree of wettability kept before sticking the masking tape 81. As a result, when sticking the substrate 9 to a sealing substrate in the sealing process of the substrate 9, the sealing material can be uniformly applied to the seal region, and reliability of sealing between the substrate 9 and the sealing substrate can be enhanced. COPYRIGHT: (C)2008,JPO&INPIT
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