| 摘要 |
PROBLEM TO BE SOLVED: To form a position instruction such that reduction in positioning time and smoothing of speed pattern in short-distance positioning operation such as short pitch operation can be attained. SOLUTION: In the process of forming a position instruction for increasing a position instruction differential speed VC that is a difference between current value and previous value for each instruction period, when it is determined that deceleration stop at a position cannot be attained according to a designated acceleration AC if the differential speed is further increased, the position instruction is formed based on a position instruction differential speed VM that is the possible highest speed in the deceleration stop at the position, the position instruction is formed so that a speed pattern formed based on the relation between speed and time is symmetric. COPYRIGHT: (C)2008,JPO&INPIT
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