发明名称 |
Method of deciding focal plane and method of crystallization using thereof |
摘要 |
A crystallization method and system are provided which improve a crystallization process by deciding a best-fit focal plane for a laser beam using a test mask and then applying the decided best-fit focal plane to the crystallization process. The crystallization method includes loading a test mask on a mask stage; deciding a best-fit focal plane by performing a crystallization test using the test mask, checking the test result and deciding conditions of a best-fit focal plane from the test result; moving the mask stage to a position corresponding to the best-fit focal plane; loading a mask for crystallization process onto the moved mask stage; and performing the crystallization process using the mask for crystallization process.
|
申请公布号 |
US2008011726(A1) |
申请公布日期 |
2008.01.17 |
申请号 |
US20070826160 |
申请日期 |
2007.07.12 |
申请人 |
SEO HYUN S;JUNG YUN H;KIM YOUNG J;YOU JAESUNG |
发明人 |
SEO HYUN S.;JUNG YUN H.;KIM YOUNG J.;YOU JAESUNG |
分类号 |
B23K26/02;G02F1/13;B23K26/00;B23K26/03;B23K26/04;B23K26/06;H01L21/20;H01L21/268 |
主分类号 |
B23K26/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|