| 摘要 |
An XY planar system having a base is disclosed. The base has a surface defining an XY plane, the XY plane has an X axis and a Y axis. An X guide coupled to the base. A first set of three main bearings riding on the surface and configured to constrain a Y stage in a Z direction perpendicular to the XY plane and to rotationally constrain the Y stage in an alpha and beta directions where alpha is rotation about the X axis and beta is rotation about the Y axis. The Y stage is coupled to the X guide and the X guide linearly constrains the motion of the Y stage along the Y axis and constrains the angular motion of the Y stage in the gamma direction, where gamma is rotation about the Z axis. The Y stage is configured to travel along the X guide in the X direction. A second set of three main bearings are coupled to the XY plane and configured to linearly support a carriage in the Z direction and to rotationally constrain the carriage in the alpha and beta directions. The carriage is coupled to the Y stage and the Y stage linearly constrains the motion of the carriage along the X axis and constrains the angular motion of the carriage in the gamma direction. The carriage is configured to travel along the Y stage in the Y direction.
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