| 摘要 |
A deposition apparatus is provided to improve the productivity of an organic electro luminescence device by simultaneously forming an organic deposition film through a flow member installed with respect to a plurality of film deposition objects such that the processed substrates are increased. A deposition apparatus comprises a holding member, a deposition source(10) and a flow member. The holding member is disposed in a chamber(50) to hold a plurality of film deposition objects in different surfaces. The deposition source includes deposition material, which is deposited on a plurality of the film deposition objects. The flow member is connected to the deposition source to guide the deposition material evaporated from the deposition source into the film deposition objects. The holding member holds such that at least two film deposition objects are opposed to each other.
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