Deep UV telecentric imaging system with axisymmetric birefringent element and polar-orthogonal polarization

摘要

Axisymmetric birefringent materials are incorporated into a deep UV imaging system by exploiting axial symmetries. A polar orthogonal polarization pattern is relayed conjugate to a pupil of a telecentric imaging system to avoid birefringence of axisymmetric birefringent optics located in telecentric object or image space.